PowerMEMS 2018

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PowerMEMS School


08:40 - 09:25

09:25 - 10:10

10:30 - 11:15

11:15 - 12:00

13:30 - 14:15

14:15 - 15:00

15:20 - 16:05

16:05 - 16:50

Electrostatic Energy Harvesters, from MEMS to TENG

Philippe Basset
Professor, Université Paris-Est / ESIEE Paris, France


As the need for new miniature sources of ambient energy increases, the development of electrostatic Kinetic Energy Harvester (e-KEH) are under research for more than one decade. With e-KEH, the energy of mechanical vibrations is converted into electrical energy by varying the capacitance of an electromechanical transducer [1]. An initial bias is required that can be provided by an external voltage source, an electret layer or successive triboelectric contacts. With triboelectric e-KEH, also known as Tribo-Electric Nano-Generator (TENG) [2], the initial charging is based on charge transfer between materials covering the electrodes with different electronegativity conditions.

Compared to electret-based e-KEHs, TENGs do not carry a pre-imposed charge with them. The electrical bias depends on the applied force, the coefficient of friction, the surface energy, the ambient humidity and the electron affinity of the contacting materials. Therefore, the level of triboelectric charging is mainly random and it is very difficult to reach the theoretical maximum charge density on the material surface, as with corona-charged electret. Consequently, it is important to have an efficient conditioning circuit that maximizes the electrical charge in the transducer.

This lecture will present the basic of the electrostatic transduction for kinetic energy harvesting and how the tools and circuits developed for traditional MEMS e-KEHs can be applied to TENGs.

[1] P. Basset, E. Blockhina and D. Galayko, "Electrostatic Kinetic Energy Harvesters", "Electrostatic Kinetic Energy Harvesters", Nanotechnologies for Energy Recovery Set, Wiley-ISTE, 244 pages, March 2016
[2] F.-R. Fan, Z.-Q. Tian and Z. Lin Wang, "Flexible triboelectric generator," NanoEnergy, Vol. 1, no 2, pp. 328 - 334, 2012

About the Speaker

Philippe Basset is professor at Université Paris-Est / ESIEE Paris. He received his Ph.D. from IEMN / University of Lille in 2003 in the areas of microelectronic and micro-electro-mechanical-systems (MEMS). In 2004, he was a post-doc at Carnegie Mellon University, Pittsburgh, USA and he joined ESIEE Paris in 2005.

His current research interests include micro-power sources for autonomous MEMS and micro/nano-structuration of silicon. He serves in the International Steering Committee of the PowerMEMS conference since 2015 and is currently deputy director of the ESYCOM laboratory.

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